Modelling and Analysis of ZnO Piezoelectric-Based Circular Diaphragm Pressure Sensor

Modelling and Analysis of ZnO Piezoelectric-Based Circular Diaphragm Pressure Sensor
  IJETT-book-cover           
  
© 2023 by IJETT Journal
Volume-71 Issue-11
Year of Publication : 2023
Author : Moirangthem Shamjit Singh, Pradip Kumar Kalita, Heisnam Shanjit Singh, Maibam Sanju Meetei
DOI : 10.14445/22315381/IJETT-V71I11P208

How to Cite?

Moirangthem Shamjit Singh, Pradip Kumar Kalita, Heisnam Shanjit Singh, Maibam Sanju Meetei, "Modelling and Analysis of ZnO Piezoelectric-Based Circular Diaphragm Pressure Sensor," International Journal of Engineering Trends and Technology, vol. 71, no. 11, pp. 84-89, 2023. Crossref, https://doi.org/10.14445/22315381/IJETT-V71I11P208

Abstract
This paper illustrates the mathematical model and simulation of a ZnO piezoelectric-based circular diaphragm pressure sensor. The load stress analytical model and stress-voltage model of the sensor are described in the mathematical model in this study. The various parameters influencing the sensor's developed stress and output voltage are discussed. Among the various piezoelectric materials, namely PZT, PVDF, PMN-PT, LiNbO3, AlN, and ZnO used for designing piezoelectric-based sensors, ZnO is adopted in this study as it has a high piezoelectric voltage coefficient with a value of -4.85x10-2 Vm/N. For the purpose of validating the analytical model, simulations of the 3D model sensor are performed using the COMSOL Multiphysics Simulator. The output characteristics of the sensor are found linearly with applied pressure and with a negative slope during the validation of the analytical model using the simulated values. The negative charge is generated at the place where tensile stress is developed, and the positive charge is generated at the place where compressive stress is developed, as found in this work. It is shown that nearly equal sensitivities of the mathematical model and simulated model of the proposed sensors are respectively detected at -3.552 mV/kPa and -3.426 mV/kPa.

Keywords
Charge, Linear, Meshing, Sensitivity, Stress.

References
[1] Tahera Kalsoom et al., “Advances in Sensor Technologies in the Era of Smart Factory and Industry 4.0,” Sensors, vol. 20, no. 23, pp. 1- 22, 2020.
[CrossRef] [Google Scholar] [Publisher Link]
[2] Kenji Uchino, “Piezoelectric Devices for Sustainability Technologies,” Reference Module in Earth Systems and Environmental Sciences, 2022.
[CrossRef] [Google Scholar] [Publisher Link]
[3] N. Soin, S.C. Anand, and T.H. Shah, Energy Harvesting and Storage Textiles, 2nd ed., Handbook of Technical Textiles, vol. 2, pp. 357- 396, 2016.
[CrossRef] [Google Scholar] [Publisher Link]
[4] Diego Galar, and Uday Kumar, Chapter 8 - Actuators and Self-Maintenance Approaches, eMaintenance Essential Electronic Tools for Efficiency, Academic Press, pp. 475-527, 2017.
[CrossRef] [Google Scholar] [Publisher Link]
[5] Erik Schlangen et al., Piezoelectric Energy Harvesting from Pavement, Eco-Efficient Pavement Construction Materials, Woodhead Publishing Series in Civil and Structural Engineering, pp. 367-382, 2020.
[CrossRef] [Google Scholar] [Publisher Link]
[6] Kritika Khandelwal, and Deepesh patidar, “A Design of Optical Fiber Bragg Grating Sensor for Pressure and Temperature Monitoring,” SSRG International Journal of Electronics and Communication Engineering, vol. 3, no. 8, pp. 6-9, 2016.
[CrossRef] [Publisher Link]
[7] Amal Megdich, Mohamed Habibi, and Luc Laperrière, “A Review on 3D Printed Piezoelectric Energy Harvesters: Materials, 3D Printing Techniques, and Applications,” Materials Today Communications, vol. 35, 2023.
[CrossRef] [Google Scholar] [Publisher Link]
[8] Moirangthem Shamjit Singh, Pradip Kumar Kalita, and Maibam Sanju Meetei, “Piezoelectric-Based Square Diaphragm Pressure Sensor Modelling and Analysis Using PZT-5H and PZT-5A,” SSRG International Journal of Electrical and Electronics Engineering, vol. 10, no. 8, pp. 1-8, 2023.
[CrossRef] [Publisher Link]
[9] Vladimír Kutiš et al., “MEMS Piezoelectric Pressure Sensor-Modelling and Simulation,” Procedia Engineering, vol. 48, pp. 338-345, 2012.
[CrossRef] [Google Scholar] [Publisher Link]
[10] S. Timoshenko, and S. woinowsky-krieger, Theory of Plates and Shells, New York: McGraw Hill, pp. 1-580, 1959.
[Google Scholar] [Publisher Link]
[11] Ansel C. Ugural, Plates and Shells: Theory and Analysis, 4th ed., CRC Press, pp. 1-618, 2018.
[Google Scholar] [Publisher Link]
[12] Minhang Bao, Analysis and Design Principles of MEMS Devices, Elsevier Science, pp. 1-382, 2005.
[CrossRef] [Google Scholar] [Publisher Link]
[13] Jules Fridolin Bayol, Louis Monkam, and Samuel Epesse Misse, “Analysis of the Deformation and of the Stress Intensity Factor on a Simplified Cylinder Head of a Variable Compression Rate Engine,” SSRG International Journal of Mechanical Engineering, vol. 9, no. 3, pp. 1-14, 2022.
[CrossRef] [Google Scholar] [Publisher Link]
[14] Ingo Kuehne et al., “A New Approach for MEMS Power Generation Based on a Piezoelectric Diaphragm,” Sensors and Actuators A: Physical, vol. 142, no. 1, pp. 292-297, 2008.
[CrossRef] [Google Scholar] [Publisher Link]
[15] Mario Di Giovanni, Flat and Corrugated Diaphragm Design Handbook, 1st ed., CRC Press, pp. 1-404, 1982.
[Google Scholar] [Publisher Link]